Micro- and Nanotechnology 1
| Degree programme | Mechatronics |
| Subject area | Engineering & Technology |
| Type of degree | Master Full-time Winter Semester 2023 |
| Course unit title | Micro- and Nanotechnology 1 |
| Course unit code | 024612110801 |
| Language of instruction | German |
| Type of course unit (compulsory, optional) | Compulsory optional |
| Teaching hours per week | 4 |
| Year of study | 2023 |
| Level of the course / module according to the curriculum | |
| Number of ECTS credits allocated | 6 |
| Name of lecturer(s) | Thomas AUER, Stephan KASEMANN, Stefan PARTEL, Dana SEYRINGER, Sandra STROJ |
Basic knowledge in engineering (BSc in mechatronics, software and information engineering).
Introduction to semiconductor technology and micro structuring. This comprises fundamentals of physics, chemistry, micro optics, crystal growth, measurement and characterization techniques as well as the basic methods of micro- and nanotechnology along with the main processes of up to date component integration.
The first semester covers the following topics:
- General Intruduction into Nano- and mikrotechnology
- Utilized materials
- Plasma and vacuum
- Physical vapor deposition techniques (evaporation and sputtering)
- Photolithography as a patterning technique
- Introduction to the vast field of semiconductor technology (manufacturing of Integrated Circuits)
- Overview of micro lithography methods (copying structures from the design layer to the substrate surface using mask projection techniques)
- Overview of structure transfer processes (subtractive and additive methods in micro structuring)
- "Hands on" course in a cleanroom
Theoretical course with subsequent laboratory exercises after each topic
Exam
Target audience: Students in the fields of electrical engineering, communications engineering, control engineering, automation engineering, software and information engineering who want to get an introduction to the extensive field of micro technology, semiconductor technology and micro structuring methods. Offered is a substantiated overview of this sector, which may well serve as a solid basis for a future specialization.
Scripts, chapters from Books, e.g.
- Chen, Wai-Kai (ed.): (2007): The VLSI handbook. 2nd ed. Boca Raton, FL: CRC/Taylor & Francis (= The electrical engineering handbook series).
- Helbert, John N. (ed.): (2001): Handbook of VLSI microlithography: principles, technology, and applications. 2nd ed. Norwich, NY: Noyes Publications/William Andrew Pub.
- Madou, Marc J (2002): Fundamentals of microfabrication: the science of miniaturization. Boca Raton: CRC Press.
Courses / Laboratory exercises